Aluminum Nitride Crucible ALN Aluminum Crucible
Hōʻike Huahana
Hoʻohui ʻia ʻo AlN e ka hoʻemi wela o ka alumina a i ʻole ka nitride pololei o ka alumina.Loaʻa iā ia ka mānoanoa o 3.26 i hoʻopaʻa ʻia a mālama ʻia e MarkMonitor-3, ʻoiai ʻaʻole ia e hoʻoheheʻe ʻia, decomposes ma luna o 2500 °C ma ka lewa.Hoʻopaʻa ʻia ka mea i ka covalently a kūʻē i ka sintering me ke kōkua ʻole o kahi mea hoʻohui wai.ʻO ka maʻamau, ʻae nā oxides e like me Y 2 O 3 a i ʻole CaO no ka hoʻokō ʻana i ka sintering ma nā mahana ma waena o 1600 a me 1900 °C.
ʻO ka nitride alumini ka mea hana ceramic me ka hana piha maikaʻi loa, a hiki ke huli ʻia kāna noiʻi ʻana ma mua o hoʻokahi haneli mau makahiki i hala.Ua haku ʻia ʻo F. Birgeler lāua ʻo A. Geuhter i loaʻa i ka makahiki 1862, a i ka makahiki 1877 e JW MalletS Aluminum nitride i synthesized no ka manawa mua, akā ʻaʻole ia i hoʻohana pono ʻia no nā makahiki he 100, i ka wā i hoʻohana ʻia ai i mea hoʻomomona kemika. .
No ka mea ʻo ka alumini nitride he hui covalent, me ka liʻiliʻi hoʻoheheʻe ponoʻī a me ka helu heheʻe kiʻekiʻe, paʻakikī ke sintering.ʻAʻole ia a hiki i ka makahiki 1950 i hana maikaʻi ʻia nā seramika nitride aluminika no ka manawa mua a hoʻohana ʻia ma ke ʻano he mea refractory i ka hoʻoheheʻe ʻana i ka hao maʻemaʻe, ka alumini a me ke alumini alumini.Mai ka 1970s, me ka hohonu o ka noiʻi ʻana, ua ulu nui ka hoʻomākaukau ʻana o ka nitride aluminika, a ua hoʻonui ʻia kāna noi noi.Ma muli o ke komo ʻana i ke kenekulia 21, me ka hoʻomohala wikiwiki ʻana o ka ʻenehana microelectronics, mīkini uila a me nā ʻāpana uila e pili ana i ka miniaturization, māmā, hoʻohui, a me ka hilinaʻi kiʻekiʻe a me ke kuhikuhi puka mana kiʻekiʻe, ʻoi aku ka nui o nā mea paʻakikī o ka substrate a me nā mea hoʻopihapiha o ka hoʻokuʻu ʻana i ka wela. i mua i nā koi kiʻekiʻe, e hoʻoikaika hou i ka hoʻomohala ikaika o ka ʻoihana nitride aluminika.
Nā hiʻohiʻona nui
AlN Kūʻē i ka ʻino ʻana o ka hapa nui o nā metala i hoʻoheheʻe ʻia, ʻoi aku ka alumini, lithium a me ke keleawe
He kū'ē i ka nui o ka paʻakai hoʻoheheʻe ʻia, me nā chlorides a me ka cryolite
ʻO ka hoʻokō wela kiʻekiʻe o nā mea seramika (ma hope o ka beryllium oxide)
Ka leo kiʻekiʻe resistivity
Ka ikaika dielectric kiʻekiʻe
Hoʻopau ʻia e ka waikawa a me ka alkali
Ma ke ʻano o ka pauka, hiki ke maʻalahi i ka hydrolyzed e ka wai a i ʻole ka makū
Noi Nui
1, ka palapala noi piezoelectric
Loaʻa i ka nitride alumini ka resistivity kiʻekiʻe, ka conductivity thermal kiʻekiʻe (8-10 mau manawa o Al2O3), a me ka coefficient hoʻonui haʻahaʻa e like me ke silika, he mea kūpono ia no nā mea uila kiʻekiʻe a me ka mana kiʻekiʻe.
2, ka mea hoʻoheheʻe uila substrate
ʻO ka mea hoʻohana maʻamau i hoʻohana ʻia i ka beryllium oxide, alumina, alumini nitride, a me nā mea ʻē aʻe, kahi o ka alumina ceramic substrate he haʻahaʻa haʻahaʻa haʻahaʻa, ʻaʻole i kūlike ka coefficient hoʻonui wela i ke silika;ʻoiai he waiwai maikaʻi loa ka beryllium oxide, akā he mea ʻawaʻawa kona pauka.
Ma waena o nā mea seramika i hiki ke hoʻohana ʻia e like me nā mea substrate, ʻo ka silicon nitride ceramic ka mea kiʻekiʻe kiʻekiʻe ke kuʻekuʻe ʻana, ke kūpaʻa maikaʻi i ka lole, ʻo ia ka mea seramika me ka hana mechanical piha maikaʻi loa, a me ka mea liʻiliʻi liʻiliʻi loa.ʻO ka alumini nitride ceramics he kiʻekiʻe ka thermal conductivity, maikaʻi ke kūpaʻa hopena wela, a loaʻa nō nā waiwai mechanical maikaʻi i ke kiʻekiʻe wela.Ma ke ʻano o ka hana, ʻo ka nitride aluminika a me ka silicon nitride i kēia manawa nā mea kūpono loa no nā substrates hoʻopihapiha uila, akā loaʻa iā lākou kahi pilikia maʻamau ʻo ke kumukūʻai kiʻekiʻe loa.
3, a pili i nā mea luminescent
ʻO ka laula kiʻekiʻe loa o ke āwaha bandgap pololei o ka nitride aluminika (AlN) ʻo 6.2 eV, ʻoi aku ka kiʻekiʻe o ka hoʻololi photoelectric i hoʻohālikelike ʻia me ka indirect bandgap semiconductor.AlN Ma ke ʻano he kukui polū koʻikoʻi a me nā mea hoʻomāmā kukui UV, ua hoʻohana ʻia ia i ka UV / deep UV light-emitting diode, UV laser diode a me UV detector.Eia kekahi, hiki i ka AlN ke hana i nā hoʻonā paʻa mau me ka hui III nitrides e like me GaN a me InN, a hiki i kāna ternary a i ʻole quaternary alloy ke hoʻoponopono mau i kona ʻāwaha pū mai ka ʻike ʻia a i nā kaula ultraviolet hohonu, e lilo ia i mea nui luminescent hana kiʻekiʻe.
4, i hoʻohana ʻia i nā mea substrate
ʻO nā kristal AlN kahi substrate kūpono no GaN, AlGaN a me nā mea epitaxial AlN.Hoʻohālikelike ʻia me ka substrate sapphire a i ʻole SiC, ʻoi aku ka nui o ka AlN me ka GaN, ʻoi aku ka kiʻekiʻe o ka hoʻohālikelike kemika, a emi ke kaumaha ma waena o ka substrate a me ka papa epitaxial.No laila, ke hoʻohana ʻia ʻo AlN crystal e like me kahi substrate epitaxial GaN, hiki iā ia ke hōʻemi nui i ka defect density i ka hāmeʻa, hoʻomaikaʻi i ka hana o ka hāmeʻa, a loaʻa kahi manaʻo noi maikaʻi i ka hoʻomākaukau ʻana i ka wela kiʻekiʻe, ke alapine kiʻekiʻe a me ka uila mana kiʻekiʻe. nā mea hana.
Eia hou, hiki i ka AlGaN epitaxial material substrate me AlN crystal me ke alumini kiʻekiʻe (Al) mea hiki ke hoʻemi pono i ka defect density i ka nitride epitaxial layer, a hoʻomaikaʻi nui i ka hana a me ke ola lawelawe o ka mea nitride semiconductor.Ua hoʻohana pono ʻia nā mea ʻike makapō kiʻekiʻe i kēlā me kēia lā e pili ana iā AlGaN.
5, hoʻohana ʻia i nā seramika a me nā mea refractory
Aluminum nitride hiki ke noi i ka sintering o structural seramics, hoomakaukau alumini nitride seramics,ʻaʻole wale maikaʻi mechanical waiwai, peluʻi ikaika oi aku mamua o Al2O3 a me BeO seramics, kiʻekiʻe paakiki, akā, kiʻekiʻe wela a me ka corrosion kū'ē.Ke hoʻohana nei i ka AlN ceramic heat resistance a me ka corrosion resistance, hiki ke hoʻohana ʻia e hana i nā ʻāpana kūpaʻa wela wela e like me ka crucible a me Al evaporation plate.Eia kekahi, ʻo nā seramika AlN maʻemaʻe he mau aniani aniani ʻeleʻele ʻole, me nā waiwai optical maikaʻi loa, a hiki ke hoʻohana ʻia e like me ka puka aniani infrared kiʻekiʻe a me ka uhi pale wela no ka hana ʻana i nā seramika māmā e hana i nā mea uila uila.
6. Huipuia
ʻO ka Epoxy resin / AlN composite material, ma ke ʻano he mea hoʻopihapiha, pono i ka conductivity thermal maikaʻi a me ka hiki ke hoʻopau wela, a ʻoi aku ka paʻakikī o kēia koi.Ma ke ʻano he polymer me nā waiwai kemika maikaʻi a me ke kūpaʻa mechanical, maʻalahi ka hoʻōla ʻana o ka resin epoxy, me ka haʻahaʻa haʻahaʻa haʻahaʻa, akā ʻaʻole kiʻekiʻe ka conductivity thermal.Ma ka hoʻohui ʻana i nā nanoparticles AlN me ka conductivity thermal maikaʻi loa i ka resin epoxy, hiki ke hoʻomaikaʻi maikaʻi ʻia ka conductivity thermal a me ka ikaika.